See Publications
for citations of recent papers.
Thin-film silicon transistors on
flexible substrates
- Our workhorse
technology is amorphous silicon transistors made at 150ºC on polyimide
foil. Our next goal is a TFT process for clear plastic substrates.
- We are targeting thin film transistors made of nanocrystalline for
isothermal processing of CMOS on plastic substrates.
We have reached hole and electron mobilities of 0.2 cm2/Vs
and 40 cm2/Vs. At present we are focussing on gate
dielectrics made at very low temperature.
- A complete CMOS process based on polycrystalline silicon films on
steel foil substrates was developed recently.
We collaborate with Prof. Jim Sturm in Electrical Engineering.
Flexible, stretchable,
deformable electronics
We explore the electrical and mechanical limits for the deformation of
surfaces of amorphous silicon transistor or OLEDs. We have
thin-film metallization that can be stretched reversibly by as much as
100%. Here we collaborate
with Profs. Jim Sturm, Wolé Soboyejo in
Mechanical Engineering, and Zhigang
Suo of Harvard University.
Surface
microfluidics
In collaboration with Prof. Sandra Troian in Chemical Engineering we are working on thin
film devices and materials for an electronically addressed microfluidic
chip that she invented.
Direct printing of electronic
materials
We have made copper lines by inkjet printing and
imprinting, etch masks and interlevel insulation for thin film
electronics by laser and
letterpress printing, in collaboration with Prof. Sandra Troian .
Functional cells for
macroelectronics
We are working to demonstrate the elementary cells
for large area sensors and actuators, and for electrotextiles.
|